Multi-channel piezo controller M-2629S(C)
Feedback control of the piezo stage using a maximum of three-axis strain gauge sensors is possible.
By equipping our standard piezo driver M-2629 series with the M-5106 servo unit, feedback control of the piezo stage using up to three-axis strain gauge sensors is possible. Furthermore, by incorporating the capacitive displacement sensor M-2218, feedback control using capacitive displacement sensors is also achieved. It can be mounted on a JIS rack and is compatible with "piezo with built-in strain gauge sensors (from various manufacturers)."
- 企業：メステック
- 価格：Other
